Semiconductor O-Rings
Ultra-high purity FFKM and PTFE seals for plasma etch, CVD, ALD and deposition tools.
Overview
Semiconductor fabrication is one of the most demanding sealing environments on earth. Process chambers operate at high temperatures with aggressive fluorinated plasma chemistries that destroy standard elastomers in hours. Any particle, outgas, or metallic ion from a seal can ruin a wafer batch worth thousands of dollars.
We supply ultra-high purity FFKM and virgin PTFE seals specifically formulated for semiconductor manufacturing. Our materials are designed for low particle generation, minimal metallic extractables, and maximum resistance to O2, CF4, Cl2 and NF3 plasma. All products are shipped in cleanroom-compatible packaging with full lot traceability.
Recommended Materials
Typical Applications
- Wafer processing equipment seals
- Chemical mechanical planarization seals
- Photolithography seals
- Etch chamber seals
- Ion implanter seals
- Gas delivery system seals
- Vacuum chamber seals
- High-purity fluid seals
Relevant Standards
Frequently Asked Questions - Semiconductor
Why must semiconductor seals be white or translucent?
Carbon black fillers used in standard black O-rings can shed particles and contaminate wafers. Semiconductor-grade FFKM uses non-carbon fillers and is typically white or translucent.
What is the maximum temperature for FFKM in a process chamber?
Special high-temperature FFKM grades can operate continuously up to +300°C and handle short-term excursions to +325°C in static plasma chamber seals.
Can PTFE be used in dynamic semiconductor seals?
Standard solid PTFE O-rings are not suitable for dynamic service. For dynamic valves and pumps in semiconductor tools, spring-energised PTFE seals are used instead.
Do you provide SEMI-compliant documentation?
Yes. We provide lot-specific material certificates, outgassing data, and metallic ion content reports. SEMI and AMS compliance documentation is available on request.